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Powder Solution

Material Property
(APS Coating Powder)

Material Property
(Y2O3 Sintered Body)

Y2O3 Tube
OD330 x ID 260 x 300t

Y2O3 Plate
OD 390 x 15t

Parts
ESC Plate

Material  : Al2O3, AlN
Size         : For 200mm / 300mm equipment
Features :
    - High purity
    - High plasma durability
    - Good chucking and de-chucking response
    - High and low temperature application

Ceramic

Material  : Y2O3, YAG, Al2O3
Size         : Customized Size
                  (OD ma 400mm, Thickness max 300mm)
Features :
    - High purity
    - High plasma durability

Material  : Y2O3, YAG, Al2O3
Size         : Customized Size
                 
Features :
    - High purity
    - High plasma durability
    - High surface roughness(hole inner surface)

Material  : Y2O3, YAG, Al2O3
Size         : Customized Size
                 
Features :
    - High purity
    - High plasma durability
    - Surface shape & roughness control
    - Micro hole drilling(0.1~0.5mm)

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